发明名称 |
Process for producing ceramic sintered body having metallized via hole |
摘要 |
A process for producing a ceramic sintered body having a metallized via hole previously formed after lamination of the ceramics is disclosed and said process comprises immersing in a first liquid a ceramic semi-sintered body formed through heating at 500 to 900 DEG C. and having a large number of pores and a straight via hole, thereby to allow the first liquid to penetrate into the pores of the semi-sintered body, subsequently immersing the resulting semi-sintered body in a suspension of electrically conductive powder particles having an average particle size of 2 to 3 mu m in a second liquid incompatible with the first liquid, thereby to fill the via hole with the suspension, and then sintering the resulting semi-sintered body in a non-oxidizing atmosphere.
|
申请公布号 |
US5318744(A) |
申请公布日期 |
1994.06.07 |
申请号 |
US19920926654 |
申请日期 |
1992.08.10 |
申请人 |
NGK SPARK PLUG CO., LTD. |
发明人 |
MORIKAWA, ASAO;KONDO, KAZUO |
分类号 |
C04B38/00;C04B41/51;C04B41/52;C04B41/85;C04B41/88;C04B41/89;H01L21/48;H05K1/03;H05K3/10;H05K3/40;H05K3/46;(IPC1-7):B22F1/00;B22F7/00 |
主分类号 |
C04B38/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|