| 摘要 |
PURPOSE:To enable shortening of the processing time of recognition by moving a coarse standard pattern at every skip width and providing a new search area widened for the skip width outside the coordinates where the relation coefficient to this pattern becomes maximum. CONSTITUTION:A coarse standard pattern RF1 thined for every specified pixel of a standard pattern RF2 in XY directions is adjusted to the left upper end of a search area SA1 and a relation coefficient of RF1 to SA1 is obtained. The RF1 is gradually moved for a specified skip width to XY directions and this process is repeated. When the RF1 moved for all SA1, the RF 1 is adjusted to the coordinate where the relation coefficient becomes maximum at a new search area SA2 widened for SK to the outside is set. An inspected pattern OB is included in the SA2. Then SK width is halved and a new search area SA3 is similarly obtained from SA2. The RF2 is moved at every pixel G in SA3 to XY directions, a coordinates where the relation coefficient of RF2 to the SA3 becomes maximum, is obtained and the position of OB is specified. |
