摘要 |
PURPOSE:To provide the two-wavelength antireflection film which is subjected to stable antireflection in both of a UV region and a visible region. CONSTITUTION:Low-refractive index materials and intermediate-refractive index materials are alternately laminated successively from the incident side of light onto a substrate surface in such a manner that the optical film thickness thereof attains 0.2 to 0.4lambda0 at the first layer, 0.05 to 0.2lambda0 at the second layer, 0.2 to 0.4lambda0 at the third layer and 0.4 to 0.6lambda0 at the fourth layer when the central wavelength is designated as lambda0, by which the antireflection film is subjected to the antireflection to two wavelengths. |