| 摘要 |
PURPOSE:To improve foreign matter detection ability by applying fractal theory to the output waveform of a foreign matter detecting sensor to quantity complexity of output signal waveform. CONSTITUTION:The chemical flowing from a chemical tank 1 to a piping 2 passes through a foreign matter detecting sensor 3, and the analogue signal outputted from the sensor 3 is converted into digital signal (4), then sent to a calculator 5. The calculator 5 performs arithmetic processing with discrete data series (herein after referred to as time series). In short, an averaging part 5-1, for improved S/N in the time series and also for maintained fractal characteristics, performs integration averaging process, to calculate fractal dimension, for a fractal analyzing part 5-2 to make quantitative review. A decision part 5-3 comparison-calculates the fractal dimension with that pre-calculated for each chemical containing no foreign matter, for deciding presence of foreign matter. If it is decided that foreign matter is present, a printer 6 records chemical, kinds of foreign matter, detection time, etc., so that an alarm device 7 reports mingled foreign matter. |
