| 摘要 |
PURPOSE:To provide a sensor having high performance, a small size and a low cost by so connecting a first flat plate having a piezoelectric element for sensing the deformed quantity of a detecting beam to a second flat plate having a vibrating mechanism for vibrating in a direction perpendicular to the first plate that the directions of the surfaces become parallel. CONSTITUTION:An angular velocity sensor comprises a flat plate 101 for forming a detector, a flat plate 105 having a driving mechanism for vertically vibrating substantially perpendicularly to the direction of the surface of the plate 101, and a connector 106 for connecting the plates 101, 105 at ends. The plate 101 has a weight 103 for receiving a Coriolis force at an angular velocity and a beam 102 to be deflected in a direction in a plate when the weight 103 and the beam 102 are received by the Coriolis force and for holding the weight 103 at the plate 101. Sensing piezoelectric elements 201 each for detecting a strain quantity are provided at both sides of the plate oppositely to a neutral plane of the beam 102 when the beam 102 is deflected. A strain quantity is detected by the difference of the outputs of the elements 201 to obtain an angular velocity. |
