发明名称 |
Method and apparatus for detecting wavelength of laser beam |
摘要 |
A laser light, whose wavelength is to be measured, is introduced into an etalon, a concentric circular interference stripe derived from the etalon is irradiated onto a one-dimensional photodetector array and a diameter of the interference stripe is measured to measure the wavelength of the laser light. Alternatively, if a reference laser light of known wavelength is introduced into the etalon, as described above, a wavelength measurement of extremely high accuracy can be made without being affected by positional deviations of the optical system.
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申请公布号 |
US5319441(A) |
申请公布日期 |
1994.06.07 |
申请号 |
US19930114287 |
申请日期 |
1993.09.01 |
申请人 |
MITSUI PETROCHEMICAL INDUSTRIES, LTD. |
发明人 |
TERADA, MITSUGU;OHMATA, KEN;UEHARA, MICHITO;SHIBATA, HIDEAKI;OEDA, YASUO;TERASHI, YUICHIRO |
分类号 |
G01J3/26;G01J9/02;H01S3/00;(IPC1-7):G01B9/02 |
主分类号 |
G01J3/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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