| 摘要 |
<p>PURPOSE: To surely treat a high pressure gas such as poisonous or high purity gas by minimizing leak to the inside or the outside by providing all the pressure supply and fluid circulation paths inside one small main body part. CONSTITUTION: A main body 10 is composed of confronted pressure reducing valves internally connected in switchable form. Especially, a 1st pressure reducing valve 20 is composed of a 1st switching valve input 22, valve chamber 26, diaphragm 28, valve poppet 30 having a poppet head 34 arranged on a valve board 24, and exhaust duct 32. In the case of assembly, diaphragms 28 and 28' are air-tightly arranged between chamber walls 40 and 40' and flanges 42 and 42'. Especially, a seal line is formed along the outer periphery of diaphragms 28 and 28'. A lever assembly 16 for regulating the extension of a spring is composed of a lever arm 44, driving screw 46 and spring plate 48 abuting on a spring 14.</p> |
