| 摘要 |
PURPOSE:To provide a planar polishing device equipped with a sizing device which correctly detects the transfer of an upper surface plate and can carry out the sizing with high precision. CONSTITUTION:On a relaying plate 19 for fixing the upper surface plate 1 at the lower edge of a stud 18 extending downward from a surface plate suspension 17, a pair of stays 28 and 28 are erected independently from the stud, and a detecting plate 29 is installed in a noncontact state with the surface plate suspension 17 between these stays, and the contact needle 25a of the probe 25 of a constant dimension device is brought into contact with the chip 30 installed on the detecting plate 29. Accordingly, the transmission of the vibration of an automatic center adjusting bearing 16 or the surface plate suspension 17 to the detecting plate 29 or the exertion of the influence of the strain due to the pressurization for the stud 18 is prevented, and the displacement of the upper surface plate 1 through the detecting plate 29 is correctly detected. |
