Method of manufacturing sharp waveguide branches in integrated optical components.

摘要

To manufacture a channel-type waveguide pattern (1.1) having Y-shaped branches and a sharp vertex (V) on or in a substrate (1), masks (6 and 7) which partially overlap one another are used for two different etching steps, which successively define a part of the Y-shaped pattern. In this process, use is made of only one auxiliary mask layer (2) made of suitably chosen material which can be etched in the first etching step but is resistant in a second etching step involving dry etching.