Process for the preparation of partially-substituted fluorosilane.

摘要

A process is provided by the present invention for the preparation of a partially-substituted fluorosilane represented by the following formula: SiHnF4-n wherein n stands for an integer of 1 to 3. The process comprises converting a corresponding partially-substituted chlorosilane into the partially-substituted fluorosilane by halogen replacement while using a fluorinating agent. The fluorinating agent is anhydrous zinc fluoride having at least 500 ANGSTROM in terms of the size of crystallites of the (110) plane.