| 发明名称 |
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| 摘要 |
<p>Disclosed is a quantitative evaluation method of optical absorption image which applies rays of light to a sample to obtain a quantitative optical absorption image without using destructive inspection and which can measure automatically and easily the dispersion of resistivity of the sample by calculating the mean value and standard deviation of the quantitative optical absorption image.</p> |
| 申请公布号 |
JPH0641910(B2) |
申请公布日期 |
1994.06.01 |
| 申请号 |
JP19880049848 |
申请日期 |
1988.03.04 |
| 申请人 |
MITSUI MINING & SMELTING CO |
发明人 |
MORYA KAZUO;HIRAI KATSUYUKI;KIMURA MIKIO |
| 分类号 |
G01N21/35;G01N21/00;G01N21/27;G01N21/3563;G01N21/59;G01N21/84;H01L21/66;(IPC1-7):G01N21/27 |
主分类号 |
G01N21/35 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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