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发明名称
PATTERN-FORMING PROCESS UTILIZING RADIATION-INDUCED GRAFT POLYMERIZATION REACTION.
摘要
申请公布号
EP0328655(B1)
申请公布日期
1994.06.01
申请号
EP19880906082
申请日期
1988.07.11
申请人
HITACHI, LTD.
发明人
MOCHIJI, KOZO;OIZUMI, HIROAKI;SODA, YASUNARI;OGAWA, TARO;KIMURA, TAKESHI
分类号
G03C5/00;G03F7/00;G03F7/027;G03F7/038;G03F7/38;H01L21/027;H01L21/30;H01L21/302;H01L21/3065;(IPC1-7):G03C5/00;G03C1/72;G03F7/26
主分类号
G03C5/00
代理机构
代理人
主权项
地址
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