Method of and apparatus for measuring film thickness.,申请号EP19890112669-传众专利搜索

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发明名称	Method of and apparatus for measuring film thickness.
摘要
申请公布号	EP0350869(B1)	申请公布日期	1994.06.01
申请号	EP19890112669	申请日期	1989.07.11
申请人	DAINIPPON SCREEN MFG. CO., LTD.	发明人	KONDO, NORIYUKI DAINIPPON SCREEN MFG. CO., LTD.
分类号	G01B11/06;(IPC1-7):G01B11/06	主分类号	G01B11/06
代理机构		代理人
主权项
地址

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