DRY ETCHING PROCESS AND APPARATUS THEREFOR,申请号JP19910000633-传众专利搜索

首页产品黄页商标征信

会员服务注册登录

法人/股东/高管

发明名称	DRY ETCHING PROCESS AND APPARATUS THEREFOR
摘要
申请公布号	JPH06151391(A)	申请公布日期	1994.05.31
申请号	JP19910000633	申请日期	1991.01.08
申请人	NEC CORP	发明人	TERAOKA ARITONO
分类号	C23F1/12;H01L21/302;(IPC1-7):H01L21/302	主分类号	C23F1/12
代理机构		代理人
主权项
地址

您可能感兴趣的专利

BELT RETRACTOR HAVING A FORCE LIMITATION DEVICE AND A TIGHTENING DEVICE

AMINO TRIAZOLES AS PI3K INHIBITORS

CONTAINER ASSEMBLED FROM MULTIPLE LATERAL ELEMENTS AND A BOTTOM PLATE, AND PARTITION THAT CAN BE INSERTED INTO SAID CONTAINER

CONTROL SYSTEM FOR SPRINKLING OF SNOW REMOVAL CHEMICALS

OPEN-TYPE BOTTOM BRAKET FOR BICYCLE

TRANSPORT OF AGGREGATED CLIENT PACKETS

LOCAL OSCILLATOR BUFFER AND MIXER HAVING ADJUSTABLE SIZE

CARD CONNECTOR FOR RECEIVING MULTIPLE CARDS

RUBBER MIXTURES CONTAINING SILANE AND HAVING POSSIBLY FUNCTIONALIZED DIENE RUBBERS AND MICROGELS, A METHOD FOR THE PRODUCTION THEREOF, AND USE THEREOF

CONVEYANCE ASSISTING DEVICE OF GLASS RIBBON

OPERATING METHOD OF NON VOLATILE MEMORY DEVICE

Einteiliger, ungeklebter Displaysockel

Klemmschiene zum Befestigen von Notizzetteln

Sicherheitssteuervorrichtung

COMPOSITION, TRANSFER SHEET, MELAMINE DECORATIVE BOARD, AND METHOD FOR PRODUCING MELAMINE DECORATIVE BOARD

PROCESS FOR PRODUCING NITRILE RUBBER-METAL LAMINATE

FREEZING STORAGE DEVICE

DOUBLE-SAFETY LOCKING PIN DEVICE

Improved latch assembly having rotatable latch element