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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH06151876(A)
申请公布日期
1994.05.31
申请号
JP19920299759
申请日期
1992.11.10
申请人
ROHM CO LTD
发明人
NAKAMURA TOMOHITO
分类号
H01L21/8234;H01L21/762;H01L21/8247;H01L27/088;H01L29/788;H01L29/792;(IPC1-7):H01L29/788
主分类号
H01L21/8234
代理机构
代理人
主权项
地址
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