| 摘要 |
PURPOSE:To provide a transparent thin film heater by which temperature rise time can be shortened and which has excellent heat resistant characteristics and durability by laminating a metallic thin film layer having a specific transparent thin film layer of metallic nitride on a single surface or both surfaces of a transparent molding base body. CONSTITUTION:A transparent sheet heating element 1 is formed by laminating a Pd thin film layer 5 on a transparent molding base body 6 composed of a polyethylene terephthalate film by a high frequency sputtering method. In succession, an Ag thin film layer 4 is formed directly by a DC sputtering method, and a PD thin film layer 3 is formed on it by the high frequency sputtering method. At this time, thickness of a Pd+Ag+Pd thin film is set to about 50Angstrom . Next, a GaN thin film 2 is formed on the layer 3 in thickness of 350Angstrom by a high frequency magnet sputtering method formed by using a powder target of GaN. Since sheet resistance on the surface of a transparent thin film layer becomes 20OMEGA/square unit or less, temperature rise time can be shortened. |
