PANCAKE TYPE SUSCEPTOR,申请号JP19920303686-传众专利搜索

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发明名称	PANCAKE TYPE SUSCEPTOR
摘要
申请公布号	JPH06151310(A)	申请公布日期	1994.05.31
申请号	JP19920303686	申请日期	1992.11.13
申请人	HITACHI CHEM CO LTD	发明人	ISHII MAKOTO
分类号	H01L21/205;(IPC1-7):H01L21/205	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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