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发明名称
MANUFACTURE OF BI-MOS
摘要
申请公布号
JPH06151725(A)
申请公布日期
1994.05.31
申请号
JP19920292588
申请日期
1992.10.30
申请人
OKI ELECTRIC IND CO LTD
发明人
KURODA SHUNICHI;KIMURA TATSUYA
分类号
H01L21/302;H01L21/3065;H01L21/336;H01L21/8249;H01L27/06;H01L29/78;(IPC1-7):H01L27/06;H01L29/784
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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