Coating apparatus with pattern width control

摘要

An apparatus for manipulating a spray device having a spray nozzle relative to a target substrate, which apparatus includes drive mechanisms for moving the spray device in the X, Y and Z directions, and separate mechanisms for rotating the spray nozzle relative to the spray device and for tilting the spray nozzle relative to the spray device and including a pressure regulator to vary the width of the spray pattern as the spray device moves relative to the target substrate.