AIR-LOCK TRANSFER PORT AND REDUCED-CONTAMINATION MANUFACTURING SYSTEM

摘要

PURPOSE: To provide a clean room environment for panel process and manufacture. CONSTITUTION: A transfer vessel 101 is used to transport a panel into a process enclosure under clean room state, and also to between process enclosures, while an air-lock opening is provided on its front surface. Further, the inter-process transfer 101 comprises a periphery front edge 105 which encloses the air-lock, further in cooperation with a facing gasket on the air-lock transport of the process enclosure, the gasket is compressed for forming an airtight seal between them.