| 摘要 |
PURPOSE:To regenerate a laser gas, by using an oxidation catalyst and a low- cost shift reaction catalyst that is reacted with an impurity produced by electric discharge during the operation of a CO2 gas laser system. CONSTITUTION:Hydrogen or water vapor is added to a circulating line 2 in a main laser unit 1 or to a laser gas in a reactor 11. A laser gas is regenerated from CO, NOx, O2 in the following reactive formula using an oxidation catalyst and a highly active copper-zinc-based shift reaction catalyst, which reacts at low temperatures. Through the oxidation catalyst there are chemical reactions: (1) CO+1/2 O2 CO2, (2) NOx+CO N2+CO2. Then, CO2 and H2 are regenerated in a shift reaction with steam: (3) CO+H2O CO2+H2. Through this H2 or additional H2, a reaction is generated as follows: (4) NOx+H2 N2+H2O. |
