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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH06151613(A)
申请公布日期
1994.05.31
申请号
JP19920300990
申请日期
1992.11.11
申请人
KAWASAKI STEEL CORP
发明人
AIKAWA HIROSHI
分类号
H01L21/28;H01L21/316;H01L21/768;(IPC1-7):H01L21/90
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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