发明名称 Electron microscope equipped with x-ray analyzer
摘要 An electron microscope equipped with an x-ray detector whose position is made different, depending on whether the detector is in use or not. The microscope prevents the irradiated position and the image from escaping even when the detector is moved into or out of a valve. A switch is operated to move the detector. The microscope has a deflection current-correcting circuit which supplies correcting currents to the deflection coils in step with the operation of the switch.
申请公布号 US5317154(A) 申请公布日期 1994.05.31
申请号 US19930027090 申请日期 1993.03.05
申请人 JOEL LTD. 发明人 HONDA, TOSHIKAZU
分类号 G01Q30/02;H01J37/244;H01J37/26;(IPC1-7):H01J37/244 主分类号 G01Q30/02
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