HIGH FREQUENCY POWER SOURCE MATCHING DEVICE IN PLASMA POLYMERIZING DEVICE,申请号JP19920008735-传众专利搜索

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发明名称	HIGH FREQUENCY POWER SOURCE MATCHING DEVICE IN PLASMA POLYMERIZING DEVICE
摘要
申请公布号	JPH06151091(A)	申请公布日期	1994.05.31
申请号	JP19920008735	申请日期	1992.01.21
申请人	TSUKISHIMA KIKAI CO LTD	发明人	NUKITA TAKESHI
分类号	D01D5/24;H05H1/46;(IPC1-7):H05H1/46	主分类号	D01D5/24
代理机构		代理人
主权项
地址

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