发明名称 SEMICONDUCTOR INTEGRATED CIRCUIT PACKAGE, ITS MANUFACTURE, AND ITS MOUNTING METHOD
摘要 PURPOSE:To enable the manufacture of an IC suitable for a high frequency circuit and a high-speed switching circuit. CONSTITUTION:An external lead electrode (S1-S5) is formed, using a photolithography technique in wafer process, and then resin is applied on a wafer, keeping it in wafer condition, and then it is cured (S7 and S8), and the surface of the wafer is polished (S9) so as to form an electrode constituted of a cleaned external lead electrode 18, and this wafer is diced and sliced and cut (S12) and expanded (S13), thus an IC, which has a protective package having resin for a package and a polished electrode on the wafer, is made. Hereby, IC packaging process is executed in wafer condition, so it can be badge-processed, and productivity can be improved, thus it has an effect of getting a highly accurate object at low cost.
申请公布号 JPH06151587(A) 申请公布日期 1994.05.31
申请号 JP19920327335 申请日期 1992.11.11
申请人 MITSUBISHI ELECTRIC CORP 发明人 SHINOMIYA KOJI
分类号 H01L21/304;H01L21/301;H01L21/56;H01L21/60;H01L21/66;H01L23/31;H01L23/36 主分类号 H01L21/304
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