WAFER BOAT MADE OF SINGLE CRYSTAL SILICON

摘要

PURPOSE:To manufacture it without using a silicon single crystal ingot with a diameter larger than that of a loaded wafer. CONSTITUTION:In a wafer boat made of single crystal silicon, where a plurality of rods 2 having many grooves with which the margins of semiconductor wafers 1 engage are arranged to go along the periphery of semiconductor wafers 1 and besides are combined dismountably with the end support members 3 arranged at both ends, the end support members 3 are constituted in U shape where two or more plate-shaped segments 9 and 10 are piled up partially and are coupled by rods 2.