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发明名称
METHOD OF DETERMINATION OF CONTENT OF IMPURITY IN CRYSTALLINE SILICON
摘要
申请公布号
RU2013821(C1)
申请公布日期
1994.05.30
申请号
SU19914951394
申请日期
1991.06.27
申请人
NAUCHNO-ISSLEDOVATELSKIJ FIZIKO-KHIMICHESKIJ INSTITUT IM.L.YA.KARPOVA
发明人
LOZOVSKIJ ALEKSANDR D;PANESH ANATOLIJ M;SIMONOV ALEKSANDR P
分类号
H01L21/66;(IPC1-7):H01L21/66
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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