| 摘要 |
PURPOSE:To provide a highly accurate capacitance type mechanical amount sensor which has the high temperature stability and reduces the loss because of resistance components or the like as soon as possible. CONSTITUTION:The lower face of a weight part 14 formed of a silicon plate 10 is used as a common electrode 18. A first and a second fixed electrodes 16, 17 are formed on a glass plate 12 below the common electrode 18. The electrodes 16, 17 can be taken outside via respective wirings 19, 20. Accordingly, a first capacitance C1 is generated between the first fixed electrode and the common electrode, and similarly, a second capacitance C2 is given rise to between the second fixed electrode and the common electrode. Since the capacitances C1, C2 share the common electrode 18 at one ends thereof, the equivalent circuit is in such structure that the first and second capacitances are connected in series. Almost the whole of the circuit to detect the capacitance is constituted of electrodes and wirings of low resistance values. |
