| 摘要 |
<p>PURPOSE:To accurately align a moving stage with a reference face. CONSTITUTION:When a moving state 2 is moved along a guide face 3, its distance up to a reference face 1 is measured by sensors 31 to 33. Thereby, the rolling and the pitching with reference to the reference face 1 of the moving stage 2 are detected and corrected.</p> |
