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发明名称
SUBSTRATE CARRIER FOR VACUUM FILM FORMATION
摘要
申请公布号
JPH06145980(A)
申请公布日期
1994.05.27
申请号
JP19920298583
申请日期
1992.11.09
申请人
NKK CORP;DAINIPPON INK & CHEM INC
发明人
ISHIZUKA HITOSHI;YAMATO MASAYUKI;KARIBAYASHI HIDEKI
分类号
C23C14/56;C23C14/50;(IPC1-7):C23C14/56
主分类号
C23C14/56
代理机构
代理人
主权项
地址
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