| 摘要 |
<p>PURPOSE:To provide a method for measuring distance or position of an object in a plurality of dimensions including width, height, and length in which measurement is not restricted to measurable axial direction of light receiving element. CONSTITUTION:When the position in Z-axis (height H) direction of a bonding wire 2a is measured by means of a one-dimensional CCD 1a in addition to the pitch (X-axis direction) thereof, a reference point is marked in the height (H) direction and the one-dimensional CCD 1a is focused thereat and the position of the one-dimensional CCD 1a at that time point is set as the reset position R of the CCD. A bonding wire 2a for an LSI is placed between a light source 3a and the one-dimensional CCD 1a. Upon starting measurement of the pitch of bonding wire 2a, the one-dimensional CCD 1a is moved in Z-axis direction and a moving distance (h) is measured based on the reset position R of CCD when the brightness of the wire 2a, determined from the shade thereof, is lowest.</p> |
