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发明名称
VACUUM PUMP
摘要
申请公布号
JPH06147186(A)
申请公布日期
1994.05.27
申请号
JP19920293095
申请日期
1992.10.30
申请人
HITACHI KOKI CO LTD
发明人
NEMOTO TOSHIO;OGURA MITSUO;TOYOSHIMA TAKESHI;SAKAZUME AKIO
分类号
F04D19/04;F04D23/00;H01L21/302;H01L21/3065;(IPC1-7):F04D23/00
主分类号
F04D19/04
代理机构
代理人
主权项
地址
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