摘要 |
<p>PURPOSE:To attain a static pressure gas bearing suitable for high speed rotation by providing a thrust plate nearly in the center in a hollow rotary shaft direction, and increasing a resonance frequency. CONSTITUTION:A rotary shaft 1 has a hollow structure composed of a pair of cylindrical parts 1b, 1c and a thrust plate part 1d arranged therebetween, and made of ceramic. A bearing housing 2 has radial bearing pads 3a, 3b for injecting gas respectively toward the cylindrical parts 1b, 1c of the rotary shaft 1, and thrust bearing pads 4a, 4b for injecting gas respectively toward both sides of the thrust plate part 1d. Since an insert or a tap for joining the thrust plate is dispensed with, possible damage caused by centrifugal force is eliminated. A resonance frequency is thus increased due to reduction of weight so as to prevent oscillation.</p> |