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发明名称
CVD APPARATUS
摘要
申请公布号
JPH06145989(A)
申请公布日期
1994.05.27
申请号
JP19920312698
申请日期
1992.10.29
申请人
IWASAKI ELECTRIC CO LTD
发明人
HORIKOSHI SOICHIRO
分类号
C23C16/44;C23C16/448;H01L21/205;(IPC1-7):C23C16/44
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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