| 摘要 |
PURPOSE:To automatically set the optimum contamination counting time according to a fluctuation in a background. CONSTITUTION:The title monitor in which an object under test is placed on a conveyor and conveyed and which judges the contamination state of the object is provided with a background measuring means 14 which measures a background level. In addition, the title monitor is provided with a counting- time decision means 15 which finds the contamination counting time which puts a true counted value not including a background into the range of a predetermined contamination control level on the basis of a measured value measured by the background measuring means 1 4 and on the basis of the contamination control level. The title monitor is provided with a speed control means 11 which controls the speed of the conveyor according to the contamination counting time decided by the counting-time decision means 15.
|
