| 摘要 |
PURPOSE:To obtain such a photosensitive resin that has excellent coating property, has excellent storage stability without the change in viscosity or deterioration in coating property during storage, has a wide process latitude and easy working property for patterning, and does not produce defect such as uneven coating and stripes after coating. CONSTITUTION:This photosensitive resin compsn. essentially consists of an alkali-soluble siloxane polymer, compd. which produces a reaction promotor with light, and solvent. The alkali-soluble siloxane polymer is obtd. by adding water and catalyst to alkoxysilane to effect hydrolysis condensation and then removing water and catalyst from the reaction soln. |
