发明名称 Microscopic transmitter or detector of electromagnetic radiation - has two or more faces of tip coated with thin electromagnetic radiation absorbing layers, with point and edge uncoated
摘要 The edges and the point of the polyhedral tip (P) have a radius of curvature of less than 200 nm. The body of the tip is of a material which is suitable for the special function of the probe, or of a material such as glass, quartz, sapphire, diamond, gallium arsenide or silicon. The material may be electro-optically passive or active. Two or more side faces of the tip have thin electromagnetic radiation absorbing layers. The point and at least one edge between adjacent faces are uncoated so that an uncoated electrically insulating gap is formed having a width of less than 0.2 micron. USE - For use as probe for measuring spatial distribution of electromagnetic fields, and especially for use as probe for optical scanning near field microscopy. Also for microlithography or hologram recording.
申请公布号 DE4329985(A1) 申请公布日期 1994.05.26
申请号 DE19934329985 申请日期 1993.09.04
申请人 DANZEBRINK, HANS-ULRICH, 38122 BRAUNSCHWEIG;FISCHER, ULRICH, 48159 MUENSTER 发明人 DANZEBRINK, HANS-ULRICH, 38122 BRAUNSCHWEIG;FISCHER, ULRICH, 48159 MUENSTER
分类号 G01Q60/18;G02B21/00;G03F7/20;(IPC1-7):G01N23/225;G02B21/02;G02B6/02;G02F1/01;H01L31/021 主分类号 G01Q60/18
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