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发明名称
Verfahren und Vorrichtung zur Trocknung eines polymeren Schutzüberzugs
摘要
申请公布号
DE4239006(A1)
申请公布日期
1994.05.26
申请号
DE19924239006
申请日期
1992.11.19
申请人
NAUCNO-PROIZVODSTVENNAJA FIRMA AKCIONERNOE OBSCESTVO ZAKRYTOGO TIPA "TECHNOLOGIJA, OBORUDOVANIE, MATERIALY" (A/O "TOM"), MOSKAU
发明人
PEREMYSCHEV, VLADIMIR ALEKSANDROVICH, MOSKAU/MOSKVA
分类号
B05C9/12;B05C9/14;B05D3/00;B05D3/02;B05D3/04;B05D3/12;F26B3/00;F26B7/00;F26B15/12;F26B15/18;H01L21/027;H01L21/30;H01L21/56;(IPC1-7):F26B19/00
主分类号
B05C9/12
代理机构
代理人
主权项
地址
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