发明名称 METHOD OF FABRICATING MEMBRANES MOUNTED ON A FRAME
摘要 The invention concerns a method of fabricating membranes mounted on a frame, the method including the following steps: (a) a membrane film is applied to a substrate in such a way that it can be detached from the substrate again, (b) the frame is built up on the membrane film and (c) the membrane film, together with the frame, is separated from the substrate. The aim of the invention is to be able to fabricate membranes which, in certain pre-selected areas, have physical properties which are different from the properties in the other areas. This is achieved by (d) applying a first membrane film to the substrate, (e) making at least one hole in the first membrane film and (f) covering the hole in the first membrane film over with a second membrane film.
申请公布号 WO9411719(A1) 申请公布日期 1994.05.26
申请号 WO1993EP02969 申请日期 1993.10.27
申请人 KERNFORSCHUNGSZENTRUM KARLSRUHE GMBH;MICROPARTS GESELLSCHAFT FUER MIKROSTRUKTURTECHNIK M;SCHOMBURG, WERNER;RAPP, RICHARD;KADEL, KLAUS 发明人 SCHOMBURG, WERNER;RAPP, RICHARD;KADEL, KLAUS
分类号 F04B43/04;G01L7/08;G01L9/00;G03F7/00;(IPC1-7):G01L9/00;G03F1/14 主分类号 F04B43/04
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