| 发明名称 |
Device for removing dissolved gas from a liquid. |
| 摘要 |
<p>An apparatus and a method for delivering a liquid are disclosed. The liquid contained in a vessel is subjected to a pressurized gas. Any pressurized gas dissolved in the liquid is removed in a degas module by passing the liquid through a gas permeable tube subjected to a pressure differential. Then the liquid is dispensed by a liquid mass flow controller. <IMAGE></p> |
| 申请公布号 |
EP0598424(A2) |
申请公布日期 |
1994.05.25 |
| 申请号 |
EP19930202864 |
申请日期 |
1993.10.11 |
| 申请人 |
NOVELLUS SYSTEMS, INC. |
发明人 |
VAN SCHRAVENDIJK, BART J.;BURKHART, CHRISTOPHER W.;SANTIAGO, TITO H.;POMEROY, CHARLES E.;LIND, JEFFREY W. |
| 分类号 |
B01D19/00;C23C16/44;C23C16/448;C30B25/14;(IPC1-7):C23C16/44;C23C16/50 |
主分类号 |
B01D19/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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