| 摘要 |
<p>PCT No. PCT/EP88/00527 Sec. 371 Date Feb. 14, 1989 Sec. 102(e) Date Feb. 14, 1989 PCT Filed Jul. 14, 1988 PCT Pub. No. WO88/10405 PCT Pub. Date Dec. 29, 1988.An optical scanning head (10) for measuring the surface of a work-piece (12) contains an integrated microscope. For this purpose, a deflecting mirror (38) located in the wall of the housing (14) of the scanning head is constructed as a dielectric mirror, which is impermeable for measured light, on the other hand is permeable for observation light and is also machined to optical quality on its rear side. Seated behind this deflecting mirror (38) are a tube lens (70) and an ocular lens (72), which together with the objective (24) of the scanning head (10) form a microscope.</p> |
