发明名称 |
Cathodoluminescence detector. |
摘要 |
<p>A cathodoluminescence detector (11) for the vacuum chamber specimen stage of an electron microscope comprises a base member adaptor element (27) with threaded stub (30) to connect with the microscope specimen stage (not shown here), and supporting specimen (14) on support (15) mounted on threaded boss part (27a) of element (27). Boss (27a) is secured with a planar support (21) which carries an annular photosensitive member (19) with interposed insulant layer (22) and connections (24). A parabolic reflector (16) is located over member (19) and includes aperture (18) for passage of electron beam (13). The polished concave reflective surface (17) of reflector (16) reflects radiation emitted from specimen (14) to member (19) and absorbs backscattered electrons from the specimen (14). <IMAGE></p> |
申请公布号 |
EP0598569(A1) |
申请公布日期 |
1994.05.25 |
申请号 |
EP19930309077 |
申请日期 |
1993.11.12 |
申请人 |
NATIONAL UNIVERSITY OF SINGAPORE |
发明人 |
PHANG, JACOB CHEE HONG;CHAN, DANIEL SIU HUNG;PEY, KIN LEONG |
分类号 |
G01Q30/20;H01J37/20;H01J37/244;(IPC1-7):H01J37/244 |
主分类号 |
G01Q30/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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