Immersion cleaning device

摘要

An immersion cleaning device is provided with concave portions housing respective chemical baths into which a workpiece is selectively immersed. Any gas and mist generated from the chemical baths is exhausted from the concave portions. A transportation element has a portion to hold a workpiece with takes the workpiece into or out from the chemical bath. A controller is included to control operation of transportation means. An enclosure body moves with the holding portion and is moved with the workpiece to substantially enclose any gases and chemical mist generated during the transportation. Corrosion of the device and pollution which might be caused by leaks of gases and mist to the outside are thus prevented.