GRANULAR POLYCRYSTALLINE SILICON COMPACT AND ITS PRODUCTION

摘要

PURPOSE:To provide the silicon compact extremely reduced in its staining and the method for producing the same, especially to provide the granular polycrystalline silicon compact suitable as a specimen for evaluating fine amounts of impurity elements in granular polycrystalline silicon produced with a fluidized bed reactor and the method for producing the same. CONSTITUTION:The granular polycrystalline silicon compact comprises the sintered compact of granular polycrystalline silicon. The granular polycrystalline silicon fed in a container is held and simultaneously sintered under high vacuum or under the atmosphere of a highly pure inert gas to provide the granular polycrystalline silicon compact.