MANUFACTURING PROCESS OF INORGANIC FILM BY ORGANOMETALLIC CHEMICAL STEAM PERMEATION

摘要

PURPOSE: To produce an inorganic thin membrane capable of separating oxygen from an oxygen-containing gaseous mixture. CONSTITUTION: This thin membrane is composed of a porous composite of a thin layer of a multicomponent metal oxide deposited on a porous supporting body and pores of the multicomponent metal oxide layer are filled with a metallic-based species. The inorganic thin membrane is formed by forming the porous composite having a net like structure of the pores capable of transporting the gas by depositing the porous multicomponent metal oxide layer on the porous supporting body. The net like structure of the pores forms the inorganic thin membrane substantially having no through porosity by forming plug or being filled by the infiltration of an organic metallic vapor. The porous supporting body has an average pore diameter larger than 1μm and the multicomponent metal oxide layer has an average pore diameter smaller than 1μm.