发明名称 |
Copolymer of sulfur dioxide and nuclear-substituted trialkylgermylstyrene |
摘要 |
Copolymers comprising 1-50 mole % of sulfur dioxide and 50-99 mole % of trialkylgermylstyrene, having a weight average molecular weight of 500-10,000,000 and exhibiting a high sensitivity to light, electron beam, and X-ray, as well as having an excellent anti-dry etching resistance, and their application as a positive resisting material.
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申请公布号 |
US5314978(A) |
申请公布日期 |
1994.05.24 |
申请号 |
US19920850261 |
申请日期 |
1992.03.12 |
申请人 |
KUMHO PETROCHEMICAL COMPANY, LIMITED |
发明人 |
KIM, SEONG-JU;KIM, JI-HONG;JANG, SEONG-GEUN;LEE, DAE-YOUP |
分类号 |
C08G75/00;C08G75/22;G03F7/039;(IPC1-7):C08G75/22;C08G79/00 |
主分类号 |
C08G75/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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