| 摘要 |
PURPOSE:To permit the polishing with a prescribed pressing pressure independently of the position deflection of the polished surface of a polished. article. CONSTITUTION:The feed speed of a robot arm 1 is controlled by a feed control means 13, and a polishing pad 4 is pressed at the faulty part of a coating film at a prescribed feeding speed. At this time, the pressing pressure of the polishing pad 4 for the fault of the coated film is detected by a force sensor 2. When the pressing pressure reaches a prescribed pressing pressure, the feed of the polishing pad 4 is suspended by the feed control means 13. A drive control means 15 polishes the fault of the coating film by the drive of the polishing pad 4. |
