TREATMENT OF DIAMOND

摘要

PURPOSE:To relatively easily remove causes deteriorating various characteristics such as insulating property proper to diamond without damaging diamond by heating diamond or a thin diamond film in an oxygen-contg. atmosphere. CONSTITUTION:Diamond or a thin diamond film deposited on a substrate is heated in an atmosphere contg. at least oxygen. The pref. concn. of oxygen in the atmosphere is >=80vol.%, the pref. heating temp. is 300-700 deg.C and the pref. heating time is 1min to 1hr.