| 摘要 |
PURPOSE:To make it possible to remove dust of a material to be machined efficiently from the surface of the material to be machined, reduce dispersion, absorption of laser beam by the dust, to prevent adhesion of the dust to a lens, and a flow by the dust, further, to cool both of the lens and the material to be machined sufficiently. CONSTITUTION:This device consists of a laser beam oscillartor 10 to generate ultraviolet pulse laser beam 1, a lens 12 to converge ultraviolet pulse laser beam to a focus 2, a introducing optical duct 14 which encloses an optical path between the laser beam oscillator and the lens air tihtly and the inner part of which is filled with inert gas, a moving table 16 to position the part to be machined of the material 3 to be machined to the foces of the laser beam, a machining housing 18 to enclose the apace between the lens and the material to be machined water tightly and a water circulating device 20 to circulate water between the lens and the material to be machined along the machined part of the material to be machined. |
