| 摘要 |
PURPOSE:To form a glass film for core, having excellent uniformity of refractive index in a plane and low loss and to produce an optical waveguide. CONSTITUTION:SiO2 tablets 1 and 2 containing a material for controlling a refractive index are evaporated by an electron beam metallizing method to form a glass film on a substrate 6. Tablets prepared by raw material powder having <=1mum particle diameter and uniform particle diameter are used as the tablets 1 and 2. The tablets 1 and 2 are obtained by blending the material for controlling a refractive index with SiO2 powder and burning and solidifying by a hot press and have >=90% sintering density. A material containing at least one of oxides of Ti, P, Ge, Al, B, Ta, Zn, F, etc., and oxides of rare earth elements of Er, Nd, Yb, Ce, Ho, Tm, Pr, Sm, etc., is used as the material for controlling a refractive index. |
